Title of Presentation

“Integrated microsystems based on small machines for detection and sensing”

Recently, IoT (Internet of Things) and cloud technologies gain their importance to deal with social issues including aging society, healthcare, safety, energy and environment. In addition, the concept of trillion sensor society, where sensors more than ten trillion are connected to a network or a cloud in the world, is promoting for realization. Key devices for those technologies are micro-sensors and microelectromechanical systems (MEMSs), which are compact, smart and highly-functional. Microsystem Integration Center, Tohoku University, has been developing ‘Integrated Microsystems’ based on the microsystem integration of sensors, electromechanical components, micro-optics, LSI, communication devices and bio-interfaces. These integrated microsystems can provide communication and processing functions by the monolithic integration of LSI. Also, highly-functional sensing can be achieved by using the monolithic large array of sensor elements. In addition, the scaling down of the sensor elements into a nanoscale can provide high sensitivity approaching to its physical limitation. In this talk, the integrated microsystems especially regarding MEMSs for sensing and detection will be presented. Also ultimate sensing miniaturized by nanotechnology will be introduced.

Profile

Web Site URL

http://www.nme.mech.tohoku.ac.jp/index_e.html

A brief Biography

Takahito Ono is currently a Professor at Department of Mechanical Systems and Design, Graduate School of Engineering in Tohoku University. He was born in Hokkaido, Japan on 12 July 12. He received the B.S. degree in physic from Hirosaki University, Japan, in 1990 and the M.S. degree in physics from Tohoku University, Japan. He received the D.E. degree in mechatronics and precision engineering from Tohoku University in 1996. During 1996–2001, he has been a Research Associate, and Lecturer in the Department of Mechatronics and Precision Engineering, Tohoku University. He had studied about nanomachining, scanning probe and its related technologies including high density storage devices. During 2001-2009, he has been an Associate Professor, and have developed nanomechanics and nanomechanical sensors. Since 2009, he is the Professor of Tohoku University.

His expertise is in the area of microelectromechnical systems (MEMSs), nanoelectromechanical systems (NEMSs), silicon based nanofabrication, ultrasensitive sensing based on NEMSs/MEMSs, Also during 2012-2014 he was director of Micro/Nanomachining Research and Education Center, Tohoku University. Since 2010 he serves a co-director of “Microsystem Integration Center (μSiC), Tohoku University. Since 2013, he has additional post, a Professor of Guest Courses, Mechanical Departments, The University of Tokyo, and working on Nanomechanics.

He have published 159 papers regarding microsystem and nanotechnology fields, and give 36 invited lectures at International Conferences. He is a member of The Institure of Electrical and Electronics Engineer (IEEE), The institute of Electrical Engineers of Japan (IEEJ), the Japan Society of Applied Physics (JSAP), and The Japan Society of Mechanical Engineering (JSME) etc. He was editor in chief of IEEJ Transactions on Sensors and Micromachines. Advisory board member of Journal and Micromechanics and Microengineering. He is an adviser of Core Research for Evolutional Science and Technology (CREST), regarding Nanosystems, Japanese Science Technology. Also a research leader of “Project for Developing Innovation Systems, Microsystem Integration Research Initiative”.

Details of selected Awards and Honors

Dr. Ono received Tokin Research Award from Tokin Science Foundation for the development of nanomechanical machines on 2005, also received MNC 2011 Paper Award, International Microprocess and Nanotechnology Conference, etc

A list of selected Publications

1. Yong-Jun Seo, Masaya Toda and Takahito Ono, Si nanowire probe with Nd-Fe-B magnet for attonewton-scale force detection, Journal of Micromechanics and Microengineering 25, (2015) 045015-1~045015-5.

2. Mohd Faizul Mohd Sabri, Takahito Ono, Suhana Mohd Said, Yusuke Kawai, and Masayoshi Esashi, Fabrication and Characterization of microstacked PZT actuator for MEMS applications, Journal of Microelectromechanical Systems　24, (2015) 80-90.

3. Takahito Ono, Keitaro Tanno, and Yusuke Kawai, Synchronized micromechanical resonators with a nonlinear coupling element, Journal of Micromechanics and Microengineering, 24 (2014)　025012.

4. Nguyen Van Toan, Masaya Toda, Yusuke kawai, and Takahito Ono, A Long Bar Type Silicon Resonator with a High Quality Factor, IEEJ Transactions on Sensors and Micromachines, 134, 2 (2014) 26-31.

5. Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi and Takahito Ono, Array of optically switchable emitter array with carbon nanotube grown on Si tip for multi electron beam lithography, Nanotechnolory, 24, (2013) 015203-1~015203-6.

6. Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, and Takahito Ono, Pico calorimeter for detection of heat produced in an individual brown fat cell, Applied Physics Letters 100, (2012) 154104-1~154104-4.

7. Young-Min Lee, Masaya Toda, Masayoshi Esashi, and Takahito Ono, Micro wishbone interferometer for Fourier transform infrared spectrometry, Journal of Micromechanics and Microengineering, 21, (2011) 065039(9pp)

8. Jinyang Feng, Xiongying Ye, Masayoshi Esashi, and Takahito Ono, Mechanically coupled synchronized resonators for resonant sensing applications, Journal of Micromechanics and Microengineering, 20, (2010) 115001-1~115001-5.

9. Akihiro Takahashi, Masayoshi Esashi and Takahito Ono, Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz, Nanotechnology,21,(2010),405502-1-405502-5.

10.Chuan-Yu Shao, Yusuke Kawai, Masayoshi Esashi, and Takahito Ono, Electrostatic actuator with curved electrodes for time-of-flight scanning force microscopy, Review of Scientific Instruments 81, (2010) 083702-1~083702-6.